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Abstract
This work concerns an important sector in the field of radiation-matter interaction. We propose to contribute in this domain by studying irradiation phenomena induced by electron beams interaction with solid targets. These phenomena are interesting since they could be implemented in several applications including surface characterization techniques and electronic spectroscopies. Our study was carried out by simulation using CASINO open source, which is based on Monte Carlo methods. We considered different target materials namely: silicon (Si), zinc sulphide (ZnS) and Cu2ZnSnS4 (CZTS).We succeeded in predicting several physical phenomena for incident electrons of energies lower than 50 keV. In particular, we computed the primary and backscattered electron trajectories in the targets, the absorbed energies in interaction volumes and the energy of the transmitted electrons. The microanalysis of X-rays has also been investigated.